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UHV PVD Systems

NEXUS Nanomaterials UHV Deposition System
SKU: NEXUS
Multi-purpose PVD System with nanoparticle deposition capability at its core. The NEXUS is an ultra high vacuum PVD system capable of generating both nanoparticles and thin films that is well-suited for both industry and academic research. Serving a wide range of applications including catalysis, photonics, energy storage, sensors, and life sciences. This UHV deposition system can be integrated with analytical tools to provide a fully customized solution for your research needs. Key Features • Generate complex materials by combining nanoparticles and thin films • Hydrocarbon free nanoparticles using NL-UHV • UHV system with load-lock, bakeout and pumping upgrade option • Combination turbo/dry backing pumping • Confocal port geometry for up to 5 sources • Compatible with third party sources • Coating of substrates with rotation, heating and biasing options • Interlocks to protect both personnel and equipment • Fully automated and recipe driven software ...more
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