Mounted heater with tiltable heater head (30° either side) and water-cooled power connections. Suitable for thin film deposition techniques including PVD and CVD, solar panel manufacturing, semiconductor and automated sensors.

This vacuum stage heater was built alongside some of the leaders in solar panel manufacturing processes. Heating up to 1300°C, this high-performance unit is built for long-term use under production conditions in harsh environments such as selenium alloy deposition.

The 240mm diameter allows for 8” wafer processing for increased thru-put.

Heater Arrangement:
1. Stainless steel water-cooled mounting flange with water-cooled Molybdenum feedthroughs. Carbon fibre reinforced carbon heating element on ceramic support placed in a graphite housing with Graphite cover plate.
2. The heater head is tiltable up to 30° in both directions. An indicator for the inclination angle is included in the design.
3. The heater head consists of graphite housing, ceramic support, heating element and Graphite cover plate.
4. Resistance of complete heater (plug, wiring included) 5,9 6. Ohm+/-20%@ 1300°C.
5. Internal cooling water hoses.
6. Cooling water system:
*Absolute system pressure: 10 bar
*Minimal differential pressure: 2 bar
*Maximal water flow: 2l/min @ 2bar differential pressure
*Maximal inlet temperature: 25°C
*Maximal outlet temperature: 45°C

Cooling water couplings used:
*Inlet: LP006-2-WR517
*Outlet: SP006-0-WR517
*Supplier: Walther Präzision

Power connector used:
*Type: HAN Modular heavy duty power connector
*Base flange specification: DN63 CF, sealing with silver plated Cu ring gasket, bolted to the chamber

*Modifications can be made to the heater stage (e.g. flange) subject to application and requirements.

For more information regarding specifications, application, or modifying the build to your requirements, please contact us.