UHV Systems
Thin FILM DEPOSITION
UHV CONTROLLED ENVIRONMENT SYSTEMS
Case Studies
Take a look at different UHV Systems in collaboration with Vinci Technologies
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IJL, France – Daum Lab
The technical platform consists in 28 ultra-high vacuum systems, interconnected by the 70-meter long ultra-high vacuum transfer tunnel, including a 30-meter section dedicated to technology transfer. It combines multi-material growth techniques with multi-dimensional analysis techniques for thin films.
The research topics currently developed on the platform cover the following areas:
- Materials for spintronic: ferromagnetic, magnetic oxides, strong spin orbit coupling, topological effect, etc.
- Nanomaterials for optoelectronics, photovoltaics, etc.
- 2D materials: molecular, ultra-thin oxides, etc.
- Complex alloys and quasi crystals
- Functional materials: ternary oxides, Heusler alloys, etc.
Check out the following videos:
Virtual platform
https://youtu.be/iDSFus8ZjMQ


- 1 reactive Evaporation chamber : from Vinci Technologies
- 6 Sputtering: 4 from Vinci Technologies
- 6 Molecular Beam Epitaxy MBE: 3 from Vinci Technologies
- 1 Atomic Layer Deposition ALD: Intro Chamber by Vinci Technologies
- 1 Pulsed Laser Deposition PLD: from Vinci Technologies
- 1 Rapid Thermal Annealing RTA chamber: from Vinci Technologies
At each stage of their growth, these hybrid materials can be studied and characterized, while staying under ultra-high vacuum, by using different surface analysis techniques:
Equipment for surface analysis
- Chemical: Spectroscopies (XPS, Auger, ARPES)
- Physical: Magneto-optical Kerr effect; Spectroscopies; Photo- and Cathode-luminescence
- Structural: Electron diffraction (RHEED, LEED); Microscopies (STM, AFM, SEM)
NYU, USA – CQP Lab
LAB BY ZONE
- UHV Transport system: Vinci Technologies Linear Transfer Tunnel (Mecatrans) version for samples of 2’’
- Zone-1/ Fast Entry load lock with chariot for up to 12 samples/substrates
- Zone-2/ PVD top view, Vinci Technologies growth system for metal contacts lower view
- Zone-3/ Vinci Technologies MBE-2D epitaxial gowth system top view, Vinci Technologies Preparation system for rapid thermal annealing lower view
- Zone-4/ Vinci Technologies Pulsed Laser Deposition epitaxial gowth system top view, Scienta Omicron ARPES analysis system lower view

Weizmann Inst. of Science, Israel – Condensed Matter Physics Lab

- 14m UHV Transport system: Vinci Technologies Linear Transfer Tunnel (Mecatrans) version for samples of 3’’
- 1 Glove Box MBRAUN
- 2 Sputtering: 1 from Vinci Technologies
- Plasmatherm ICP: coupled via Vinci Technologies buffer chambers
- UHV Thermal & Ebeam Evaporation from Vinci Technologies
- Atomic Layer Deposition ALD
- 1 redistribution chamber from Vinci Technologies
Naval Lab, USA – Cluster System
Equipment for developing 2D materials:
- Central Distribution Chamber with motorized automated transfer of 3 or 4’’ samples : Vinci Technologies CDC
- UHV 8 Cathode Sputtering system: from Vinci Technologies
- Specs Gmbh XPS
- UHV Molecular Beam Epitaxy MBE-2D from Vinci Technologies
- Future extension to STM

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