UHV Systems

Thin FILM DEPOSITION

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UHV CONTROLLED ENVIRONMENT SYSTEMS

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Case Studies

Take a look at different UHV Systems in collaboration with Vinci Technologies

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IJL, France – Daum Lab

The technical platform consists in 28 ultra-high vacuum systems, interconnected by the 70-meter long ultra-high vacuum transfer tunnel, including a 30-meter section dedicated to technology transfer. It combines multi-material growth techniques with multi-dimensional analysis techniques for thin films.

The research topics currently developed on the platform cover the following areas:

Materials for spintronic: ferromagnetic, magnetic oxides, strong spin orbit coupling, topological effect, etc.
Nanomaterials for optoelectronics, photovoltaics, etc.
2D materials: molecular, ultra-thin oxides, etc.
Complex alloys and quasi crystals
Functional materials: ternary oxides, Heusler alloys, etc.

Check out the following videos:

Virtual platform
https://youtu.be/iDSFus8ZjMQ

https://youtu.be/7BK7rE60_PU

Equipment for developing thin layers:

1 reactive Evaporation chamber : from Vinci Technologies
6 Sputtering: 4 from Vinci Technologies
6 Molecular Beam Epitaxy MBE: 3 from Vinci Technologies
1 Atomic Layer Deposition ALD: Intro Chamber by Vinci Technologies
1 Pulsed Laser Deposition PLD: from Vinci Technologies
1 Rapid Thermal Annealing RTA chamber: from Vinci Technologies

At each stage of their growth, these hybrid materials can be studied and characterized, while staying under ultra-high vacuum, by using different surface analysis techniques:

Equipment for surface analysis

Chemical: Spectroscopies (XPS, Auger, ARPES)
Physical: Magneto-optical Kerr effect; Spectroscopies; Photo- and Cathode-luminescence
Structural: Electron diffraction (RHEED, LEED); Microscopies (STM, AFM, SEM)

NYU, USA – CQP Lab

LAB BY ZONE

UHV Transport system: Vinci Technologies Linear Transfer Tunnel (Mecatrans) version for samples of 2’’
Zone-1/ Fast Entry load lock with chariot for up to 12 samples/substrates
Zone-2/ PVD top view, Vinci Technologies growth system for metal contacts lower view
Zone-3/ Vinci Technologies MBE-2D epitaxial gowth system top view, Vinci Technologies Preparation system for rapid thermal annealing lower view
Zone-4/ Vinci Technologies Pulsed Laser Deposition epitaxial gowth system top view, Scienta Omicron ARPES analysis system lower view

Weizmann Inst. of Science, Israel – Condensed Matter Physics Lab

Equipment for developing 2D materials:

14m UHV Transport system: Vinci Technologies Linear Transfer Tunnel (Mecatrans) version for samples of 3’’
1 Glove Box MBRAUN
2 Sputtering: 1 from Vinci Technologies
Plasmatherm ICP: coupled via Vinci Technologies buffer chambers
UHV Thermal & Ebeam Evaporation from Vinci Technologies
Atomic Layer Deposition ALD
1 redistribution chamber from Vinci Technologies

Naval Lab, USA – Cluster System

Equipment for developing 2D materials:

Central Distribution Chamber with motorized automated transfer of 3 or 4’’ samples : Vinci Technologies CDC
UHV 8 Cathode Sputtering system: from Vinci Technologies
Specs Gmbh XPS
UHV Molecular Beam Epitaxy MBE-2D from Vinci Technologies
Future extension to STM