Multi-purpose PVD System with nanoparticle deposition capability at its core.

The NEXUS is an ultra high vacuum PVD system capable of generating both nanoparticles and thin films that is well-suited for both industry and academic research. Serving a wide range of applications including catalysis, photonics, energy storage, sensors, and life sciences. This UHV deposition system can be integrated with analytical tools to provide a fully customized solution for your research needs.

Key Features
• Generate complex materials by combining nanoparticles and thin films
• Hydrocarbon free nanoparticles using NL-UHV
• UHV system with load-lock, bakeout and pumping upgrade option
• Combination turbo/dry backing pumping
• Confocal port geometry for up to 5 sources
• Compatible with third party sources
• Coating of substrates with rotation, heating and biasing options
• Interlocks to protect both personnel and equipment
• Fully automated and recipe driven software