CF Fittings ›

CF Adaptors ›

CF16 Adaptors CF35 Adaptors CF63 Adaptors CF100 Adaptors CF150 Adaptors CF200 Adaptors

CF Connectors ›

CF16 Connectors CF35 Connectors CF63 Connectors CF100 Connectors CF150 Connectors CF200 Connectors

CF16 Crosses CF35 Crosses CF63 Crosses CF100 Crosses CF150 Crosses CF200 Crosses

CF16 Elbows CF35 Elbows CF63 Elbows CF100 Elbows CF150 Elbows CF200 Elbows

CF Flange Caps ›

CF16 - Plastic CF Flange Cap CF35 - Plastic CF Flange Cap CF63 - Plastic CF Flange Cap CF100 - Plastic CF Flange Cap CF200 - Plastic CF Flange Cap CF250 - Plastic CF Flange Cap

CF16 Flanges CF35 Flanges CF63 Flanges CF100 Flanges CF150 Flanges CF200 Flanges CF250 Flanges

CF16 Copper Gaskets CF35 Copper Gaskets CF63 Copper Gaskets CF100 Copper Gaskets CF150 Copper Gaskets CF200 Copper Gaskets CF250 Copper Gaskets CF300 Copper Gaskets

CF16 Hoses CF35 Hoses CF63 Hoses CF100 Hoses

Bolts & Washers ›

CF16 Nut, Bolt and Washers CF16 Plate Nut NOTE: A set of 3 x nut plates are required per flange. Price shown is per nut plate, not set. CF16 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF35 Nut, Bolt and Washers CF35 Plate Nut NOTE: A set of 3 x nut plates are required per flange. Price shown is per nut plate, not set. CF35 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF63 Nut, Bolt and Washers CF63 Plate Nut NOTE: A set of 4 x nut plates are required per flange. Price shown is per nut plate, not set. CF63 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF100 Nut, Bolt and Washers CF100 Plate Nut NOTE: A set of 8 x nut plates are required per flange. Price shown is per nut plate, not set. CF100 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF150 Nut, Bolt and Washers CF150 Plate Nut NOTE: A set of 10 x nut plates are required per flange. Price shown is per nut plate, not set. CF150 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF200 Nut, Bolt and Washers CF200 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together CF250 Nut, Bolt and Washers CF250 Silver Plated Bolts with Plain Stainless Steel Nuts and Washers for Joining Two Through Hole Flanges Together

CF16 Tees CF35 Tees CF63 Tees CF100 Tees CF150 Tees CF200 Tees

CF Tubulations ›

CF16 Tubulations CF35 Tubulations CF63 Tubulations CF100 Tubulations CF150 Tubulations CF200 Tubulations

CF Viewports ›

CF16 Viewports CF35 Viewports CF63 Viewports CF100 Viewports CF150 Viewports

Zero Length Flange Adaptor ›

CF35 Zero Length Flange Adaptors CF63 Zero Length Flange Adaptors CF65 Zero Length Flange Adaptors CF100 Zero Length Flange Adaptors CF150 Zero Length Flange Adaptors CF200 Zero Length Flange Adaptors CF250 Zero Length Flange Adaptors

Load Lock Chambers ›

Tigfusion Load Lock Chamber CF100 Tigfusion Load Lock Chamber CF160 Tigfusion Load Lock Chamber CF200

Single Piece Chambers ›

Decagon Single Piece Vacuum Chamber DN63CF 6 Way Cube Hexadecagon (16-Sided) Single Piece Vacuum Chamber Octagon Single Piece Vacuum Chamber Octagon Single Piece Vacuum Chamber Spherical Single Piece Vacuum Chamber

ISO Fittings ›

ISO Adaptors ›

ISO63 Adaptors ISO100 Adaptors

ISO Bellows ›

ISO63 Bellows ISO80 Bellows ISO100 Bellows ISO160 Bellows ISO200 Bellows ISO250 Bellows

ISO63/100 Clamps ISO63/250 Clamps ISO160/250 Clamps ISO320/500 Clamps ISO630 Clamps

ISO Connectors ›

ISO63 Connectors ISO80 Connectors ISO100 Connectors ISO160 Connectors ISO200 Connectors ISO250 Connectors ISO320 Connectors ISO400 Connectors ISO500 Connectors

ISO Crosses ›

ISO63 Crosses ISO80 Crosses ISO100 Crosses ISO160 Crosses ISO200 Crosses ISO250 Crosses

ISO63 Elbows ISO80 Elbows ISO100 Elbows ISO160 Elbows ISO200 Elbows ISO250 Elbows

ISO Flanges ›

ISO63 Flanges ISO80 Flanges ISO100 Flanges ISO160 Flanges ISO200 Flanges ISO250 Flanges ISO320 Flanges ISO400 Flanges ISO500 Flanges ISO630 Flanges

ISO63 Hoses ISO80 Hoses ISO100 Hoses ISO160 Hoses

ISO O Rings ›

ISO63 O Rings ISO80 O Rings ISO100 O Rings ISO160 O Rings ISO200 O Rings ISO250 O Rings ISO320 O Rings ISO400 O Rings ISO500 O Rings ISO630 O Rings

ISO63 Tees ISO80 Tees ISO100 Tees ISO160 Tees ISO200 Tees ISO250 Tees

ISO Tubulations ›

ISO63 Tubulations ISO80 Tubulations ISO100 Tubulations ISO160 Tubulations ISO200 Tubulations ISO250 Tubulations ISO320 Tubulations ISO400 Tubulations ISO500 Tubulations

ISO Viewports ›

Demountable viewport on a ISO63 flange with borosilicate glass (Kodial) optic Demountable viewport on a ISO80 flange with borosilicate glass (Kodial) optic Demountable viewport on a ISO80 flange with UV grade fused silica optic Demountable viewport on a ISO100 flange with borosilicate glass (Kodial) optic Demountable viewport on a ISO100 flange with UV grade fused silica optic Demountable viewport on an ISO63 flange with UV grade fused silica optic ISO63 Viewports ISO100 Viewports ISO160F Viewport ISO200 Viewports ISO250 Viewports

KF Fittings ›

KF Adaptors ›

KF16 Adaptors KF25 Adaptors KF40 Adaptors KF50 Adaptors

KF16 Clamps KF25 Clamps KF40 Clamps KF50 Clamps

KF Connectors ›

KF10 Connectors KF16 Connectors KF25 Connectors KF40 Connectors KF50 Connectors

KF16 Crosses KF25 Crosses KF40 Crosses KF50 Crosses

KF10 Elbows KF16 Elbows KF25 Elbows KF40 Elbows KF50 Elbows

KF10 Flanges KF16 Flanges KF25 Flanges KF40 Flanges KF50 Flanges

KF16 Hoses KF25 Hoses KF40 Hoses KF50 Hoses

KF10 O Rings KF10/16 Stainless Steel Reducing Centering Ring with Viton O-Ring KF16 O Rings KF16 SS Trapped Centering Ring with Viton O-Ring KF20/25 Stainless Steel Reducing Centering Ring with Viton O-Ring KF25 O Rings KF25 SS Trapped Centre Ring with Viton O-Ring KF32/40 Stainless Steel Reducing Centering Ring with Viton O-Ring KF40 O Rings KF40 Trapped Centre ring with Viton O-Ring KF50 O Rings KF50 Trapped Centre ring with Viton O-Ring

KF16 Tees KF25 Tees KF40 Tees KF50 Tees

KF Tubulations ›

KF10 Tubulations KF16 Tubulations KF25 Tubulations KF40 Tubulations KF50 Tubulations

KF Viewports ›

Demountable viewport on a KF40 flange with borosilicate glass (Kodial) optic Demountable viewport on a KF40 flange with UV grade fused silica optic KF16 Viewports KF25 Viewports KF40 Vacuum Viewport KF50 Viewports

Motion & Manipulation ›

Angle-Adjustable Magnetic Rotary Feedthroughs ›

Angle Adjustable Magnetic Rotary Feedthrough, 0°-180°, CF16 Flange, 1/4" Shaft (pneumatic) Angle-Adjustable Magnetic Rotary Feedthrough, 0°-180°, CF16 Flange, 1/4" Shaft (manual)

Bellow Sealed Rotary Feedthroughs ›

Bellow Sealed Rotary Feedthrough (Manual) 360 Degree Continuous, CF34 Flange Bellow Sealed Rotary Feedthrough (Manual) 360 Degree Continuous, CF70 Flange Bellow Sealed Rotary Feedthrough (Stepper Motor) 360 Degree Continuous, CF34 Flange

Compact Differentially Pumped Rotary Feedthroughs ›

Compact Differentially Pumped Rotary Feedthrough (Manual) 360 Degree Rotation, CF70 Flange Compact Differentially Pumped Rotary Feedthrough (Manual) 360 Degree Rotation, CF114 Flange Compact Differentially Pumped Rotary Feedthrough (Manual) 360 Degree Rotation, CF152 Flange Compact Differentially Pumped Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF114 Flange Compact Differentially Pumped Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF152 Flange

Compact XYZ Stages ›

Compact XYZ Stage, 75mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange Compact XYZ Stage, 100mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange Compact XYZ Stage, 150mm Z Travel, +/-12.5mm XY Travel, CF70 Travelling Flange, CF114 Mounting Flange

Differentially Pumped Rotary Feedthroughs ›

Differentially Pumped Rotary Feedthrough (Manual) 360 Degree Rotation, CF114 Flange Differentially Pumped Rotary Feedthrough (Manual) 360 Degree Rotation, CF152 Flange Differentially Pumped Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF114 Flange Differentially Pumped Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF152 Flange

Full-scale XYZ Stages (crossed roller bearing) ›

Full-scale XYZ Stage (crossed roller bearings) Z-axis 200mm Travel. Full-scale XYZ Stage (crossed roller bearings) Z-axis 350mm Travel Full-scale XYZ Stage (crossed roller bearings) Z-axis 500mm Travel Full-scale XYZ Stage (crossed roller bearings) Z-axis 650mm Travel

High-precision Differentially Pumped Rotary Feedthroughs ›

High-precision Differentially Pumped Rotary Feedthrough (Optical Encoder) 360 Degree Rotation, CF203 Flange

High-precision Full-scale XYZ Stage ›

High-precision Full-scale XYZ Stage, Upto 650mm Z Travel, +/-12.5mm XY Travel, 102mm Clear Bore, CF152 Travelling Flange, CF203 Mounting Flange

Hollow Shaft Magnetic Coupled Rotary Feedthroughs ›

Hollow Shaft Magnetic Coupled Rotary Feedthrough (Manual) 360 Degree Rotation, CF70 Flange Hollow Shaft Magnetic Coupled Rotary Feedthrough (Manual) 360 Degree Rotation, CF114 Flange Hollow Shaft Magnetic Coupled Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF70 Flange Hollow Shaft Magnetic Coupled Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF114 Flange

Linear Translator with Aluminium Frame (with adjustment function) ›

Linear Translator with Aluminum Frame (Manual) 75mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Manual) 75mm Travel, +/-3mm Degree Tilt, CF114 Flange Linear Translator with Aluminum Frame (Manual) 100mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Manual) 100mm Travel, +/-3mm Degree Tilt, CF114 Flange Linear Translator with Aluminum Frame (Manual) 150mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Manual) 150mm Travel, +/-3mm Degree Tilt, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 75mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Stepper Motor) 75mm Travel, +/-3mm Degree Tilt, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 100mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Stepper Motor) 100mm Travel, +/-3mm Degree Tilt, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 150mm Travel, +/-3mm Degree Tilt, CF70 Flange Linear Translator with Aluminum Frame (Stepper Motor) 150mm Travel, +/-3mm Degree Tilt, CF114 Flange

Linear Translators ›

Linear Translator (Manual) 50mm Travel, CF34 Flange Linear Translator (Manual) 50mm Travel, CF70 Flange Linear Translator (Manual) 75mm Travel, CF70 Flange Linear Translator (Manual) 100mm Travel, CF70 Flange Linear Translator (Manual) 150mm Travel, CF70 Flange Linear Translator (Manual) 200mm Travel, CF70 Flange

Linear Translators with Aluminium Frame ›

Linear Translator with Aluminum Frame (Manual) 50mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Manual) 75mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Manual) 100mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Manual) 150mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Manual) 200mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 50mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 75mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 100mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 150mm Travel, CF114 Flange Linear Translator with Aluminum Frame (Stepper Motor) 200mm Travel, CF114 Flange

Linear Translators with Port Aligner ›

Linear Translator with Port Aligner (Manual) 75mm Travel, +/-3 Degree Tilt, CF70 Flange Linear Translator with Port Aligner (Manual) 100mm Travel, +/-3 Degree Tilt, CF70 Flange Linear Translator with Port Aligner (Manual) 150mm Travel, +/-3 Degree Tilt, CF70 Flange

Magnetic Coupled Rotary Feedthroughs ›

Magnetic Coupled Rotary Feedthrough (Manual) 90 Degree Rotation, CF34 Flange Magnetic Coupled Rotary Feedthrough (Manual) 180 Degree Rotation, CF34 Flange Magnetic Coupled Rotary Feedthrough (Manual) 360 Degree Rotation, CF34 Flange Magnetic Coupled Rotary Feedthrough (Pneumatic) 90 Degree Rotation, CF34 Flange Magnetic Coupled Rotary Feedthrough (Pneumatic) 180 Degree Rotation, CF34 Flange Magnetic Coupled Rotary Feedthrough (Stepper Motor) 360 Degree Rotation, CF34 Flange

Medium XYZ Stages ›

Medium XYZ Stage, Upto 200mm Z Travel, +/-7.5mm XY Travel, 65mm Clear Bore, CF114 Travelling & Mounting Flanges

Large Barrel Micrometres ›

XY Stage, Large Barrel Micrometers 10µm Resolution, CF70 Flanges

Sample Transfer ›

Dual Axis Wobble Stick ›

Dual-axis Wobble Stick, 150mm Linear Travel, +/-20 Degree Tilt, CF70 Flange Dual-axis Wobble Stick, 250mm Linear Travel, +/-20 Degree Tilt, CF70 Flange Dual-axis Wobble Stick, 350mm Linear Travel, +/-20 Degree Tilt, CF70 Flange

Elevating Transfer Arms ›

Elevating Transfer Arm, CF35, 900mm stroke, Manual. (requires lifting table sold separately)

Magnetic Couple Transfer Arms ›

Magnetic Couple Transfer Arm, 450mm Travel, CF70 Flange Magnetic Couple Transfer Arm, 600mm Travel, CF70 Flange Magnetic Couple Transfer Arm, 900mm Travel, CF70 Flange

Miniature Transfer Arms ›

Miniature Transfer Arm, 150mm Travel, CF34 Flange Miniature Transfer Arm, 250mm Travel, CF34 Flange Miniature Transfer Arm, 350mm Travel, CF34 Flange

Port Aligners ›

Port Aligner (Manual) +/-3 Degree Tilt, +/-5mm Axial, CF34 Flange Port Aligner (Manual) +/-3 Degree Tilt, +/-5mm Axial, CF70 Flange Port Aligner (Manual) +/-3 Degree Tilt, +/-5mm Axial, CF114 Flange Port Aligner (Manual) +/-3 Degree Tilt, +/-5mm Axial, CF152 Flange Port Aligner (Manual) +/-3 Degree Tilt, +/-5mm Axial, CF203 Flange

Portable UHV Suitcase ›

Portable UHV Suitcase

Wobble Stick ›

Wobble Stick, 150mm Linear Travel, +/-20 Degree Tilt, CF70 Flange Wobble Stick, 250mm Linear Travel, +/-20 Degree Tilt, CF70 Flange Wobble Stick, 350mm Linear Travel, +/-20 Degree Tilt, CF70 Flange

Vacuum Heating ›

Solar Panel Production Vacuum Heater Stage ›

Tiltable Vacuum Heater Stage

Vacuum Pumps ›

ANEST IWATA Oil-Free Scroll Vacuum Pump, Horizontal, 100 L/Min Description: DVSL dry/oil-free scroll vacuum pump. DVSL are well suited for industrial environments. Description: DVSL dry/oil-free scroll vacuum pump. DVSL are well suited for industrial environments.

50 L/min 90 L/min 250 L/min 500 L/min 1000 L/min

Turbomolecular Pumps ›

TURBOLAB Core Benchtop Vacuum Pumping Station

Vacuum Systems & Instruments ›

Physical Vapor Deposition Systems (PVD) ›

Benchtop Nanoparticle Systems ›

NL50 Benchtop Nanoparticle Deposition System

Compact PVD Systems ›

NL-CUBE Compact PVD System

Modular PVD Systems ›

NL-FLEX Modular PVD System

Molecular-Beam Epitaxy ›

MBE 2D Epitaxy System for Ultrahigh Vacuum

Pulsed Laser Deposition (PLD) ›

PLD 400 UHV Pulsed Laser Deposition System PLD 950 UHV Pulsed Laser Deposition System

UHV PVD Systems ›

NEXUS Nanomaterials UHV Deposition System PVD20-EB Physical Vapor (Electron Beam) Deposition System PVD20-S Physical Vapour (Sputtering) Deposition System PVD20-TE Physical Vapor (Joule Heating) Deposition System PVD-4 Physical Vapor Deposition System PVD-6 Physical Vapor Deposition System

Plasma-Enhanced Chemical Vapor Deposition (PECVD) Systems ›

Small Scale Production Plasma-Enhanced Chemical Vapor Deposition System

UHV Controlled Environment Transport Systems ›

Portable UHV Suitcase UHV Distribution Chambers UHV Linear Transfer Tunnel - Mecatrans

Vacuum Viewports ›

CF16 Viewports CF35 Viewports CF63 Viewports CF70 Viewports CF100 Viewports CF114 Viewports CF150 Viewports CF152 Viewports ISO63 Viewports ISO80 Viewports ISO100 Viewports KF40 Viewports

Small Scale Production Plasma-Enhanced Chemical Vapor Deposition System

Small Scale Production Plasma-Enhanced Chemical Vapor Deposition System

This system is used to deposit layers under high vacuum conditions on samples that are RF biased. It is a low temperature technique when compared to typical CVD process, which is a major advantage.

Core System Features:
• Base Pressure 1.10-6 mbar
• Samples up to 300 mm
• Inferior plate of 500 mm diameter with RF bias
• Various Process gases (TMS, Hexane, CF4, O 2, Ar)
• Pumping group (Suitable for corrosive gases)
• Automated Control

Applications:
• Barrier Films
• Insulators
• Optical coatings
• Biomedical

Materials:
• DLC
• Doped/Undoped Amorphous Si
• Dielectrics (Nitrides, Oxynitrides..)

This combination does not exist.

SKU: PECVD-SS-VT

Terms and Conditions
Shipping: Standard off-the-shelf stock items will be delivered within 3-5 working days. Non-stock and bespoke products will be advised on an individual basis.

Software

Powerful Software

Fully & Semi Automatic modes
User mode Access Levels

Recipe modes for

Thickness Rate & Deposition Time
Pre-programmed recipe library

Process Acquisition software with:

Rate deposition
Thickness control
Pressure Display
Temperature Control
Valve/Shutter management

Hardware

Integrated PC with Microsoft Windows

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