Compact, flexible Physical Vapor Deposition System.

The NL-Cube is a low cost, compact and flexible PVD system that offers nanoparticle deposition capability in addition to standard thin film deposition functionality in one versatile unit. There are two models: the 375 (up to five sources and substrates up to four inches in diameter) and the 300 (up to four sources and substrates up to two inches). Because of their relatively low volumes, the chambers offer rapid pump down and turnaround of around 45 minutes. The Cube is designed with three priorities in mind: cost, functionality, and reliability.

Key Features
• Available sources include magnetrons, nanoparticle, mini-e-beam, thermal boat, atom and ion sources
• Sputter-up or sputter-down configurations
• Rotation, bias, and heating up to 800ºC options
• Turnaround ~ 45 minutes
• Vacuum down to 5E-7 torr
• System chassis containing control systems, power supplies and pumps
• Integrated PC with Spectrum software allows automated process control, complex recipes and datalogging

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SKU: NL-CUBE

Terms and Conditions
Shipping: Standard off-the-shelf stock items will be delivered within 3-5 working days. Non-stock and bespoke products will be advised on an individual basis.

Control Software
System Configuration

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Intuitive "drag and drop" user interface is easy and allows full automation of the pump down and deposition sequences.

Highlights

Fully automated pump down and venting
Configure Virtual Rack to suit your process
Easy to add and remove instruments
Real Time Charting
Interlock Monitoring
Recipe Control
Data Logging Functions

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NL-CUBE 300

NL-CUBE 375

Size of deposition chamber

300 x 300 x 300 mm

375x 375 x 375 mm

Base Pressure

< 1e – 6 Torr

< 5e – 7 Torr

Orientation

Sputter down / up

Sample table

2-inch wafer, 20rpm rotation, RF/DC Bias and heating to 400oC

4-inch wafer, 20rpm rotation, RF/DC Bias and heating to 800oC

Pumping

80l/s turbo with 7.2m3/hr dry backing pump

300l/s turbo with 7.2m3/hr dry backing pump

Valves

Manual / Automated Valves, Shutters, Linear drives and Pumping Baffle valve

Control Software

Recipe driven processes, power supply control and data logging

In-situ monitoring

Quartz Crystal Microbalance for process monitoring and end point detection

Source Port

Up to 4 deposition sources

Up to 5 deposition sources

Source Type

Nanoparticle source, Magnetron sputter sources,

Mini e-beam evaporator, Thermal boat source

K-cells, Ion source, RF Atom source

Nanoparticle source, Magnetron sputter sources,

Mini e-beam evaporator, Thermal boat source

K-cells, Ion source, RF Atom source

Uniformity

+/- 2% with sample rotation

If you require any additional information regarding this product please contact us via the form below or call us on +44 (0) 1424 447726

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NL-CUBE Compact PVD System

Not Available For Sale

Highlights

If you require any additional information regarding this product please contact us via the form below or call us on +44 (0) 1424 447726

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