UHV Linear Transfer Lines, such as the MECATRANS or cluster distribution chambers are essential for transporting samples from a process or analysis system to another without breaking vacuum. Current advances in semiconductor device development such as those in quantum devices or organic film growth requires that the cleaned substrate or newly grown film is not subject to contamination. At a pressure of 1 x 10-6 mbar the crystal surface will be contaminated with a monolayer of gas in 1 second. Every order of magnitude drop in pressure from this point will result in an order of magnitude increase in time it takes the crystal to be contaminated with a monolayer of material. Typical experiments require a pressure of less than 10-4 mbar for collision free conditions and pressures of less than 10-9 mbar to maintain a sample clean surface.

UHV Transport System Product Categories