Transfer Tunnel – Mecatrans
UHV Linear Transfer Tunnel
Various materials require different deposition processes in order to create multi-material devices. Therefore, as-deposited samples are easily transportable under a controlled environment with a base pressure of 1.10-10 Torr, which protects them from oxidation and other structural or chemical changes related to atmospheric exposure.
By combining several growth, deposition and analysis techniques, the MECATRANS permits the exploration of a large range of more complex and hybrid systems for materials control at the atomic scale.
The MECATRANS is a stainless steel tunnel with an internal monorail upon which substrate train is moveable.
The samples are transported through the UHV tube on this monorail train. By means of transfer rods, the samples can be exchanged between the train and the connected chambers. The MECATRANS accommodates for a 12 two-inch sample holder on the internal monorail .
To avoid any contamination between chambers and/or vibration conduction each UHV chamber is isolated by a UHV valve and features specific components.
Substrate Holder Train
– Up to 12 substrates
The train can transport up to 12 two-inch substrate holder Molybloc type. Other type of train can be designed for specific substrate holder. It moves on a monorail with one external handle magnetically coupled with the train.
The substrate holders are transferred in the chambers with a mechanical transfer rod.
The load lock chamber is installed on the extremity of the tunnel and isolated with a gate valve. It is equipped with its own pumping group and vacuum gauge. An external monorail allows to takeout the train for substrate holder manipulation.
– Up to 12 substrates
The tunnel is composed of an unlimited number of standard tubes (304 L) with 150 mm diameter and 1 meter length.
The tubes are manufactured with UHV state of the art technology and can withstand bakeout of up to 200°C.
More than 10 standard tubes are designed with ports for :
Connexion with other tubes
Tubes with special specifications can be manufactured upon request.
-Ion & sublimation pumps
10-10 mbar can be achieved with the pumping group combination of an ion pump and a sublimation pump. This is then isolated from the tunnel by a gate valve.
An oven is recommended to regenerate the ion pump elements.