MBE (2D)
UHV Systems > Thin Film Deposition Systems > MBE (2D)
VINCI TECHNOLOGY designs smart, state of the art solutions for Ultra High Vacuum applications. Regrouping growth and surface analysis applications under a clean controlled environment to help researchers focus on development of novel materials and devices.
Core System Features
- Base Pressure 5 E 10-11 mbar
- LN2 cryo shrouds
- 2” molybloc sample puck or 3’’ bare wafer
- Up to 6 Knudsen cells (35 cc)
- Up to 3 cracker cells
- 6 x 7 cc (or 4 x 15) linear E-beam
- Pumping groups: TSP Ion Pump, Cryo or Turbomolecular Pumping
- Heating &/or cooling sample stages
- Growth feedback via flux gauge, quartz monitors
- Integrated RHEED or RHEED AUGERS
- Couples with Transfer tunnel, Load locks & Preparation chambers
Preparation & Storage Chambers
Couples with
- Storage – Base Pressure 2. 10-10 mbar
- Atm Load Lock – Base Pressure 5. 10-8 mbar
- Annealing chambers
- Out-gasing chambers
- Multiple cassette storge
- Link with MECATRANS transfer tunnel or Cluster chamber
- Optimized to fit customer lab space
Full Control User Interface
Get In Touch Today
Get in touch today to discuss your requirements, please contact us on