High-precision Full-scale XYZ Stage

SKU: HFXYZ150Z100M-1055 Category:

High-precision Full-scale XYZ Stage, Upto 650mm Z Travel, +/-12.5mm XY Travel, 102mm Clear Bore, CF152 Travelling Flange, CF203 Mounting Flange

The high-precision full-size three-dimensional translation stage allows the welding bellows to move in the three directions of X, Y, and Z. Adopts linear guide structure and high-precision ball screw, the structure is strong and compact. With servo motor and grating scale, it can achieve sub-micron precision and can also be used with a high-precision DPRF offering a 4th axis of rotation. The product is modular with multiple configurations to choose from

Please contact us for further information and pricing.


  • Clear Bore up to φ102
  • Up to 650mm Z travel, +/-12.5mm XY travel (custom options on request)
  • CF100 travel and CF152 mounting flanges
  • Servo motor with optical encoder for high precision positioning
  • Resolution of 0.2μm for X, Y & Z axes